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Micro light 3D Smart Print 3D
SMART PRINT UV is a maskless lithography equipment, based on a DMD projection technology, compatible with a wide range of resists and substrates. SMART PRINT UV can produce any 2D shapes at micron resolution without the need for a hard mask
产品描述
Our brand-new Smart Print UV (SP-UV) maskless lithography system uses a Digital Micromirror Device (DMD) technology It gives user a straightforward way to move from the design directly to the patterned sample without the use of the standard photomask fabrication.No needs of photomask means more flexibility, and faster overall fabrication time.
Our brand new software Phaos offers a unique user experience with its intuitive interface that allows users to go from a design to the fabrication of micro-patterns in just a few clicks. Phaos offers many options (automatic dose test, alignment, …) addressing both novice and advanced users.产品参数
| System | Standard | Advanced |
| Light source | Exposure : 385nm; alignment : 590nm | |
| Minimum feature size | 1.5µm | |
| Stitching precision | 2µm | <1µm |
| Alignment accuracy (for 1cm² printed area) | 2µm | 1µm |
| Maximum exposure area | 70 x 70 mm² | 118 x 118 mm² |
| Substrate size | Up to 4″ | Up to 5″ |
| Writing speed (6µm resolution) | 77 mm²/min | 220 mm²/min |
| System dimensions | W:52cm, D:52cm, H:69cm | |
